Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 5
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Low energy micron size beam from inductively coupled plasma ion source
Nabhiraj, P. Y., Menon, Ranjini, Bhandari, R. K., Mohan Rao, G., Mohan, S.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3640851
File:
PDF, 1.64 MB
english, 2011