[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - A 1.5 V supplied, CMOS ASIC for the actuation of an electrostatic micromotor
Favrat, P., Paratte, L., Ballan, H., Declercq, M., de Rooij, N.F.Year:
1996
Language:
english
DOI:
10.1109/memsys.1996.493824
File:
PDF, 886 KB
english, 1996