Double circular erosion patterns on dielectric target in...

Review of Scientific Instruments 2009 Vol. 80; Iss. 10

Double circular erosion patterns on dielectric target in magnetron sputtering

Suzaki, Yoshifumi, Miyagawa, Hayato, Ejima, Seiki
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Volume:
80
Year:
2009
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3227236
File:
PDF, 1016 KB
english, 2009
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