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Structure and crystal growth of atmospheric and low-pressure chemical-vapor-deposited silicon films
Bisaro, R., Magariño, J., Proust, N., Zellama, K.Volume:
59
Year:
1986
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.336554
File:
PDF, 1.24 MB
english, 1986