High sheet resistance, low temperature coefficient of...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2010 Vol. 28; Iss. 4

High sheet resistance, low temperature coefficient of resistance resistor films for integrated circuits

Wright, S. W., Judge, C. P., Lee, M. J., Bowers, D. F., Dunbar, M., Wilson, C. D.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3466531
File:
PDF, 407 KB
english, 2010
Conversion to is in progress
Conversion to is failed