Activation energy enhancement during initial silicon-oxide...

Activation energy enhancement during initial silicon-oxide growth in dry oxygen

Kamohara, Shiroo, Kamigaki, Yoshiaki
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Volume:
69
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.347520
File:
PDF, 794 KB
english, 1991
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