Fabrication of high-aspect-ratio lightpipes

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 3

Fabrication of high-aspect-ratio lightpipes

Ye, Winnie N., Duane, Peter, Wober, Munib, Crozier, Kenneth B.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3589809
File:
PDF, 704 KB
english, 2011
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