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Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films
Zhao, Yimin, Zhu, Chunlin, Wang, Sigen, Tian, J. Z., Yang, D. J., Chen, C. K., Cheng, Hao, Hing, PeterVolume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1785850
File:
PDF, 414 KB
english, 2004