Novel fabrication technique for nanoscale hydrogen...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 5

Novel fabrication technique for nanoscale hydrogen silsesquioxane structures using a direct printing technique

Yang, Ki-Yeon, Oh, Sang-Chul, Park, Hyungwon, Lee, Heon
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3628585
File:
PDF, 1.48 MB
english, 2011
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