Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon
Kleinsorge, B., Ferrari, A. C., Robertson, J., Milne, W. I.Volume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.373790
File:
PDF, 373 KB
english, 2000