Electrical activation of implanted phosphorus ions in [0001]- and [11–20]-oriented 4H-SiC
Schmid, F., Laube, M., Pensl, G., Wagner, G., Maier, M.Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1470241
File:
PDF, 381 KB
english, 2002