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Summary Abstract: Studies of internal stresses and surface roughness of sputtered Be and BeB films
Hsieh, E. J.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575237
Date:
May, 1988
File:
PDF, 367 KB
english, 1988