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Supersonic jet epitaxy of gallium nitride using triethylgallium and ammonia
McGinnis, Arthur J., Thomson, Darren, Banks, Andrew, Preble, Edward, Davis, Robert F., Lamb, H. HenryVolume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1532736
File:
PDF, 1.03 MB
english, 2003