Supersonic jet epitaxy of gallium nitride using...

Supersonic jet epitaxy of gallium nitride using triethylgallium and ammonia

McGinnis, Arthur J., Thomson, Darren, Banks, Andrew, Preble, Edward, Davis, Robert F., Lamb, H. Henry
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Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1532736
File:
PDF, 1.03 MB
english, 2003
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