Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators
Evoy, S., Carr, D. W., Sekaric, L., Olkhovets, A., Parpia, J. M., Craighead, H. G.Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371656
File:
PDF, 445 KB
english, 1999