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[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Highly Active Junctions Formed in Crystalline Silicon by Infrared Laser Annealing
Mannino, Giovanni, La Magna, Antonino, Privitera, Vittorio, Christensen, Jens S., Vines, Lasse, Svensson, Bengt G.Year:
2007
Language:
english
DOI:
10.1109/rtp.2007.4383857
File:
PDF, 169 KB
english, 2007