A Nanodamascene Process for Advanced Single-Electron...

IEEE Transactions on Nanotechnology 2008 / 01 Vol. 7; Iss. 1

A Nanodamascene Process for Advanced Single-Electron Transistor Fabrication

Dubuc, Christian, Beauvais, Jacques, Drouin, Dominique
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Volume:
7
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2007.913430
Date:
January, 2008
File:
PDF, 417 KB
english, 2008
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