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[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Chemical sensor utilizing indium phosphide cantilevers and pentacene as a functionalization layer
Siwak, Nathan, Xiao Fan,, Hines, Dan, Williams, Ellen, Goldsman, Neil, Ghodssi, RezaYear:
2007
Language:
english
DOI:
10.1109/memsys.2007.4433111
File:
PDF, 1.09 MB
english, 2007