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Electrostatic probe diagnostics of a planar-type radio-frequency inductively coupled oxygen plasma
Seo, D. C., Chung, T. H., Yoon, H. J., Kim, G. H.Volume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1354633
File:
PDF, 402 KB
english, 2001