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Use of reactive gases with broad-beam radio frequency ion sources for industrial applications
Schneider, St., Jolly, T. W., Kohlstedt, H., Waser, R.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1692396
File:
PDF, 722 KB
english, 2004