Analysis of optical emission spectroscopy in a...

Physics of Plasmas 2009 Vol. 16; Iss. 4

Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled CHF[sub 3] plasma

Huang, Xiao-Jiang, Xin, Yu, Yang, Lei, Ye, Chao, Yuan, Qiang-Hua, Ning, Zhao-Yuan
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Volume:
16
Year:
2009
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3122937
File:
PDF, 695 KB
english, 2009
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