Study of ZrO[sub 2] thin films for gate oxide applications

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2001 Vol. 19; Iss. 4

Study of ZrO[sub 2] thin films for gate oxide applications

Nam, Seok-Woo, Yoo, Jung-Ho, Kim, Hae-Young, Kang, Sung-Kwan, Ko, Dae-Hong, Yang, Cheol-Woong, Lee, Hoo-Jeong, Cho, Mann-Ho, Ku, Ja-Hum
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1351802
File:
PDF, 1.27 MB
english, 2001
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