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Wafer-level vacuum packaging for MEMS
Gooch, R., Schimert, T., McCardel, W., Ritchey, B., Gilmour, D., Koziarz, W.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581763
File:
PDF, 1014 KB
english, 1999