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Ion beam assisted deposition with a duoplasmatron (abstract)a)
Ensinger, W., Barth, M., Martin, H., Schröer, A., Enders, B., Emmerich, R., Wolf, G. K.Volume:
63
Year:
1992
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1142938
File:
PDF, 327 KB
english, 1992