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Microchannel Pressure Measurements Using Molecular Sensors
Huang, Chihyung, Gregory, James W., Sullivan, John P.Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.892914
Date:
August, 2007
File:
PDF, 1.68 MB
english, 2007