[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - Raman study of tungsten disilicide formation in thin films
Chaix-Pluchery, O., Lucazeau, G., Meyer, F., Aubry-Fortuna, V., Madar, R.Year:
1998
Language:
english
DOI:
10.1109/mam.1998.887563
File:
PDF, 117 KB
english, 1998