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[IEEE 2006 International Conference on Mechatronics and Automation - Luoyang (2006.6.25-2006.6.25)] 2006 International Conference on Mechatronics and Automation - Optomechatronic Design of Integrated Systems for Microassembly of MEMS Sensors
Xie, Hui, Rong, Weibin, Wang, Jiatao, Chen, WeiYear:
2006
Language:
english
DOI:
10.1109/icma.2006.257722
File:
PDF, 595 KB
english, 2006