Technological Capabilities of Vacuum Arc Plasma Sources

Vakuum in Forschung und Praxis 2014 / 10 Vol. 26; Iss. 5

Technological Capabilities of Vacuum Arc Plasma Sources

Bystrov, Yu. A., Vetrov, N. Z., Lisenkov, A. A., Kostrin, D. K.
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Volume:
26
Language:
english
Journal:
Vakuum in Forschung und Praxis
DOI:
10.1002/vipr.201400563
Date:
October, 2014
File:
PDF, 274 KB
english, 2014
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