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Ultrasensitive detection of residual gases by multiphoton ionization mass spectrometry
Chien, Ring-LingVolume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.576631
Date:
May, 1990
File:
PDF, 515 KB
english, 1990