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Silicon contamination of diamond films deposited on silicon substrates in fused silica based reactors
Borges, C. F. M., Schelz, S., St.-Onge, L., Moisan, M., Martinu, L.Volume:
79
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.361228
File:
PDF, 640 KB
english, 1996