Synthesis of carbon nitride thin films by vacuum arcs

Materials Science and Engineering: A 1996 Vol. 209; Iss. 1-2

Synthesis of carbon nitride thin films by vacuum arcs

Imad F. Husein, YuanZhong Zhou, Fan Li, Ryne C. Allen, Chung Chan, Jacob I. Kleiman, Yu Gudimenko, Clark V. Cooper
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Volume:
209
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0921-5093(95)10096-2
File:
PDF, 464 KB
english, 1996
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