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[IEEE 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA, USA (4-6 May 2004)] 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) - Successful processing of thinned silicon chips thresholds and limits in mechanical properties
Kroninger, W.J., Ossowski, L.Year:
2004
Language:
english
DOI:
10.1109/asmc.2004.1309572
File:
PDF, 307 KB
english, 2004