Electrochemical aspects of corrosion resistance and etching...

Materials Science and Engineering: A 1995 Vol. 198; Iss. 1-2

Electrochemical aspects of corrosion resistance and etching of metallizations for microelectronics

R.B. Comizzoli, R.P. Frankenthal, K.J. Hanson, K. Konstadinidis, R.L. Opila, J. Sapjeta, J.D. Sinclair, K.M. Takahashi, A.L. Frank, A.O. Ibidunni
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Volume:
198
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0921-5093(95)80070-b
File:
PDF, 738 KB
english, 1995
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