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[IEEE 2008 International Interconnect Technology Conference - IITC - Burlingame, CA, USA (2008.06.1-2008.06.4)] 2008 International Interconnect Technology Conference - 3D IC Process integration challenges and solutions
Powell, Kevin, Burgess, Stephen, Wilby, Tony, Hyndman, Rhonda, Callahan, JohnYear:
2008
Language:
english
DOI:
10.1109/iitc.2008.4546919
File:
PDF, 553 KB
english, 2008