Diffusion barrier properties of TiW between Si and Cu

Diffusion barrier properties of TiW between Si and Cu

Wang, Shi-Qing, Suthar, Sailesh, Hoeflich, Christine, Burrow, Brad J.
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Volume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353135
File:
PDF, 2.54 MB
english, 1993
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