Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition
Aresta, Gianfranco, Palmans, Jurgen, van de Sanden, Mauritius C. M., Creatore, MariadrianaVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4711762
File:
PDF, 1.40 MB
english, 2012