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GaAs device passivation using sputtered silicon nitride
Chang, Edward Y., Cibuzar, Gregory T., Vanhove, James M., Nagarajan, Rao M., Pande, Krishna P.Volume:
53
Year:
1988
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.100402
File:
PDF, 579 KB
english, 1988