Evolution of titanium residue on the walls of a...

Evolution of titanium residue on the walls of a plasma-etching reactor and its effect on the polysilicon etching rate

Hirota, Kosa, Itabashi, Naoshi, Tanaka, Junichi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4900967
Date:
November, 2014
File:
PDF, 1.37 MB
english, 2014
Conversion to is in progress
Conversion to is failed