Effect of negative dc bias voltage on mechanical property of a-C:H films deposited in electron cyclotron resonance plasma
Kamata, Kiichiro, Inoue, Tohru, Sugai, Ken-ichi, Saitoh, Hidetoshi, Maruyama, KazunoriVolume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360321
File:
PDF, 629 KB
english, 1995