Near-surface electrical effects of oxidation and hydrogenation in silicon
I. Delidais, D. Ballutaud, A. Boutry-Forveille, J.-L. Maurice, M. Aucouturier, B. LeroyVolume:
4
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(89)90257-2
File:
PDF, 346 KB
english, 1989