High quality silicon-on-insulator substrates by implanted...

High quality silicon-on-insulator substrates by implanted oxygen ions

J. Belz, G. Burbach, H. Vogt, J. Peter-Weidemann, G. Zimmer
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Volume:
4
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(89)90282-1
File:
PDF, 315 KB
english, 1989
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