High quality silicon-on-insulator substrates by implanted oxygen ions
J. Belz, G. Burbach, H. Vogt, J. Peter-Weidemann, G. ZimmerVolume:
4
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(89)90282-1
File:
PDF, 315 KB
english, 1989