Uniform surface elemental analysis using sputtering and...

Journal of Applied Physics 1999 Vol. 86; Iss. 6

Uniform surface elemental analysis using sputtering and photoionization mass spectrometry with a 6 ns pulse length Nd:YAG laser

He, Chun, Becker, Christopher H.
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Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371230
File:
PDF, 311 KB
english, 1999
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