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[IEEE 2007 International Semiconductor Device Research Symposium - College Park, MD, USA (2007.12.12-2007.12.14)] 2007 International Semiconductor Device Research Symposium - Enhanced performance in strained n-FET with double-recessed Si:C source/drain and lattice-mismatched SiGe strain-transfer structure (STS)
Kah-Wee Ang,, Hoong-Shing Wong,, Balasubramanian, N., Samudra, Ganesh, Yee-Chia Yeo,Year:
2007
Language:
english
DOI:
10.1109/isdrs.2007.4422277
File:
PDF, 281 KB
english, 2007