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[IEEE 2012 XXVth International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV 2012) - Tomsk, Russia (2012.09.2-2012.09.7)] 2012 25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) - Assurance of parts accuracy in the process of coating deposition by the vacuum arc plasma
Yagafarov, I. I., Kireev, R. M., Mukhin, V. S.Year:
2012
Language:
english
DOI:
10.1109/deiv.2012.6412578
File:
PDF, 253 KB
english, 2012