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[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Temperature compensation of silicon MEMS Resonators by Heavy Doping
Pensala, Tuomas, Jaakkola, Antti, Prunnila, Mika, Dekker, JamesYear:
2011
Language:
english
DOI:
10.1109/ultsym.2011.0486
File:
PDF, 171 KB
english, 2011