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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Carboxylic Acids as Oxygen Supplying Agents for Atomic Layer Deposition of High-k Thin Films
Rauwel, Erwan, Ducroquet, Frédérique, Rauwel, Protima, Willinger, Marc-Georg, Matko, Igor, Kiselev, Dmitry, Pinna, NicolaVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2980003
File:
PDF, 1.23 MB
english, 2008