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Side-wall damage in a transmission electron microscopy specimen of crystalline Si prepared by focused ion beam etching
Kato, N. I., Kohno, Y., Saka, H.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581795
File:
PDF, 529 KB
english, 1999