Silicon on insulator optical waveguides formed by direct wafer bonding
G.T. Reed, Li Jinhua, C.K. Tang, Lin Chenglu, P.L.F. Hemment, A.G. RickmanVolume:
15
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(92)90048-e
File:
PDF, 373 KB
english, 1992