Orientation selective epitaxial growth of CeO[sub 2](100)...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 1

Orientation selective epitaxial growth of CeO[sub 2](100) and CeO[sub 2](110) layers on Si(100) substrates

Inoue, Tomoyasu, Sakamoto, Naomichi, Ohashi, Masayuki, Shida, Shigenari, Horikawa, Akihiro, Sampei, Yoshiyuki
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1626644
File:
PDF, 359 KB
english, 2004
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