MeV heavy ion induced recrystallization of buried silicon...

Journal of Applied Physics 2007 Vol. 101; Iss. 3

MeV heavy ion induced recrystallization of buried silicon nitride layer: Role of energy loss processes

Som, T., Sinha, O. P., Ghatak, J., Satpati, B., Kanjilal, D.
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Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2435071
File:
PDF, 398 KB
english, 2007
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