Chemical vapor deposition of β-SiC on silicon-on-sapphire and silicon-on-insulator substrates
J.C. Pazik, G. Kelner, N. Bottka, J.A. Freitas Jr.Volume:
11
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(92)90204-m
File:
PDF, 381 KB
english, 1992